| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanical grating apparatus improving diffraction efficiency. SOLUTION: This grating apparatus 100 is composed on a base 50 having a surface. A spacer layer 65 having an upper surface is provided on a base 50, and a lengthwise channel 67 is formed in the spacer layer, and the channel 67 has a 1st sidewall 67a and a 2nd sidewall 67b facing opposite each other and a bottom face 67c. Plural ribbon elements 72a, 72b, which can be deformed and separated at intervals, are arranged in parallel with each other. The ribbon elements 72a, 72b which can be deformed are settled into groups with N elements which is larger than two. When its grating apparatus 100 is operated, each of the groups forms a pattern of discrete rugged shape. In this case, this pattern has n-step shape more than two steps.
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