| 摘要 |
PURPOSE: An absolute humidity sensor and a temperature/humidity detection circuit using the same are provided to simplify the manufacturing of a small sized absolute humidity sensor by forming a space for introducing humidity via through holes formed in membrane films by etching. CONSTITUTION: An absolute humidity sensor includes a substrate(11) formed with a first and second through holes in a predetermined area, a membrane film(12-1) formed on the substrate, a humidity sensing element formed on the membrane film formed with the first through hole for sensing the humidity exposed to the atmosphere and having a resistance value variable according to a sensed humidity amount, and a compensation element formed on the membrane film formed with the second through hole for compensating the resistance value of the humidity sensing element, wherein the humidity sensing element and the compensation element are formed of resistors(13) formed on the membrane film, pads(14) formed on the membrane films and electrically connected to the resistors, and a protection film(15) formed on the whole surface of the resistors to cover the resistors.
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