| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform double storage prevention, different-type substrate mix prevention, direction error prevention, and alignment by detecting the presence, size, direction, dislocation, and thickness of a glass substrate. SOLUTION: Four support pins 14 are fitted to the upper face of each of girder members 13 to form a substrate storage section 50. The glass substrate 15 is stored or extracted on the substrate storage section 50 by a robot hand. Two line sensors 55 are arranged in the vertical and horizontal directions respectively on the substrate storage section 50. The presence of the glass substrate 15 is detected by the line sensors 55. The substrate information such as the substrate size, mounting direction, inclination, and dislocation is detected by an arithmetic process from the end section positions of the detected glass substrate. The robot hand stores the glass substrate 15 one by one on each substrate storage section 50 based on the substrate information and performs an alignment correction when extracting it. The robot hand can perform a mixed process of substrates of different types by utilizing the substrate information.</p> |
