METHOD FOR MANUFACTURING FIXED VANE FOR VACUUM PUMP AND FIXED VANE OBTAINED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method for obtaining a fixed vane for a pumping stage having a groove extended approximately in the axial direction quickly and cheaply. SOLUTION: The method for manufacturing the fixed vane of a vacuum pump and the fixed vane obtained thereby are disclosed. A plurality of fixed vane disks or rings are preferably formed by press-working. The fixed vanes or rings are coaxially stacked and mutually shifted in angle so that at least one groove extending approximately in the axial direction forms a fixed vane surface specified thereon with respect to a fixed vane main body. COPYRIGHT: (C)2005,JPO&NCIPI