发明名称 |
LOWLY GRANULATING PLASMA-RESISTANT FLUORO-ALUMINA CERAMIC MATERIAL AND ITS PRODUCTION |
摘要 |
A plasma fluorine resistant polycrystalline alumina ceramic material is produced by forming a green body including alumina and a binder, and sintering the green body for a time from about 8 to 12 hours. The area % of unsintered particles in the polycrystalline alumina ceramic material does not exceed 0.1 area %, resulting in reduced emission of particles from the material after exposure to plasma fluorine. <IMAGE> |
申请公布号 |
JPH092864(A) |
申请公布日期 |
1997.01.07 |
申请号 |
JP19960121098 |
申请日期 |
1996.04.18 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
ANANDO GIYUPUTA;TEIRUNERUBERI ESU RABI |
分类号 |
F16J12/00;C04B35/10;C04B35/111;C23C16/44;H01L21/3065 |
主分类号 |
F16J12/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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