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发明名称
VORRICHTUNG ZUR THERMISCHEN BEHANDLUNG VON HALBLEITERN
摘要
申请公布号
AT388483(T)
申请公布日期
2008.03.15
申请号
AT20040007264T
申请日期
2004.03.25
申请人
ASAHI GLASS CO., LTD.
发明人
TAKATA, MASAAKI;KAGEYAMA, NOBUO;OTAGURO, SUSUMU;NISHIHAMA, JIRO
分类号
H01L21/00;H01L21/324;C23C16/00;C23C16/44;C23C16/46;C30B25/08;C30B33/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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