Three-dimensional profile measurement apparatus and method using amplitude size of projection grid

摘要

Disclosed are a three-dimensional profile measurement apparatus and method using the amplitude size of a projection grid wherein a periodic pattern of the projection grid is projected onto an object to be measured, the amplitude of the projection grid is obtained through the change of the pattern of the projection grid, and the amplitude size is continuously obtained while moving the object upwards and downwards, thus measuring the three-dimensional profile of the object.

主权项

1. A three-dimensional profile measurement apparatus using the amplitude of a projection grid, the apparatus comprising:
a pattern projection unit for projecting a pattern of the projection grid onto an object to be measured having an arbitrary height; an image acquisition unit having an image sensor for acquiring a pattern image projected onto the object; a focal position movement unit for adjusting the focal position between the pattern projection unit and the image acquisition unit so as to obtain the vivid image of the pattern of the projection grid projected onto the object; a position sensor for detecting the quantity of the focal position moved; a controller for receiving the pattern image of the projection grid acquired by the image sensor and a signal from the position sensor detecting the quantity of the focal position moved; and a calculation unit for calculating the height of the object by calculating the pattern image received by the controller and the signal from the position sensor received by the controller.