| 摘要 |
PURPOSE: To obtain a silicon carbide ceramic heater of low resistance without decreasing formability and strength by adding a binder and sulfonate to the ceramic main component comprising metal silicon and silicon carbide. CONSTITUTION: In this method for producing a ceramic heater in successive processes by adding a binder to the main component comprising metal silicon and silicon carbide, kneading the mixture, molding, degreasing by heating, and firing, a binder and a sulfonate are added to the main component. Degreasing is performed at 400-800 deg.C for 1 to 20 hours. Firing is performed at 1,100-1,450 deg.C for 3-100 hours in a nitrogen gas atmosphere under normal pressure having <=20ppm oxygen concn. By adding the binder and the sulfonate to the main component, the sulfonic acid is not removed in the degreasing process but is decomposed to leave carbon to remain, with which the metal silicon reacts in the firing process to produce silicon carbide. Since silicone carbide is a conductive material, the electric resistance of the ceramic heater thus produced is decreased. |
