PROTECTIVE FILM-FORMING SHEET AND PROTECTIVE FILM-FORMING COMPOSITE SHEET

摘要

PROBLEM TO BE SOLVED: To provide a protective film-forming sheet excellent in reworkability, and a protective film-forming composite sheet having the protective film-forming sheet on a support sheet.SOLUTION: The protective film-forming sheet is stuck to a silicon wafer to form a protective film on the silicon wafer. The protective film-forming sheet contains a polymer component (A) containing an acrylic polymer (A1) obtained by living radical polymerization using a tellurium compound and has an elongation at break in 200 μm thickness of 300% or more.SELECTED DRAWING: None