| 摘要 |
An interference observation device 1 is provided with a light source 10 that outputs incoherent light, a beam splitter 20, a sample holder 31, an objective lens 32, a reference mirror 41, a lens 42, an aberration correction plate 43, a piezo element 44, a tube lens 51, a beam splitter 52, an imaging unit, 61, a light detector 62, an image acquisition unit 71, and a control unit 72. The control unit 72 determines the interference intensity of combined light on the basis of a detection signal output from the light detector 62 and adjusts an interference optical system so that the interference intensity increases. |
