High capacity magnetic annealing system and method of operating

摘要

An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.

主权项

1. An annealing system, comprising:
a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, said inner cylindrical insulating tube defining a processing space into which a plurality of workpieces are configured to be vertically translated and subjected to thermal and/or magnetic processing; a workpiece boat configured to carry at least one hundred workpieces; a boat loader arranged beneath said vertical furnace, and configured to vertically translate said workpiece boat and position said workpieces within said processing space; and a magnet system arranged outside said vertical furnace, and configured to generate a magnetic field within said processing space, wherein said annealing system has a total height less than 3.5 m.