COLD WATER TREATMENT APPARATUS FOR ADMINISTRATING HEAT OF SEMICONDUCTOR APPARATUS

摘要

The present invention relates to a technology to neutralize alternated cooling water being acidified by maximizing reaction efficiency by maximizing a surface area of a reaction tube, and a technology to remove HF fume generated in the acidified cooling water. The present invention manufactures the reaction tube as a piece of plate having a plurality of holes formed therein to position inside a housing, and maximizes the surface area of the reaction tube with a structure to position zinc and ceramic in the shape of a ball in an inner space.