主权项 |
1. A manipulator apparatus, comprising:
a jig unit provided with a manipulator, the jig unit comprising:
a first member provided with the manipulator;a second member configured to move the first member;and a third member configured to move the second member, wherein the first member, the second member and the third member are successively placed on top of one another, and the first member is provided with a first rack gear extending in a direction of movement of the manipulator, and the third member is provided with a second rack gear extending in the direction of movement of the manipulator, wherein a pinion gear unit is provided at the second member which is between the first member and the third member, and the pinion gear unit includes first gears and second gears which engage with each other and are alternately arranged in the movement direction of the manipulator, wherein the first gears are arranged at a position to engage with the first rack gear or the second rack gear, wherein one of the first gears arranged at one side of the pinion gear unit is engaged with the first rack gear, and another of the first gears arranged at another side of the pinion gear unit is engaged with the second rack gear, wherein all the first gears are configured to rotate in the same clockwise direction at the same first rotational speed, when each of the second gears is disposed between two corresponding adjacent first gears, wherein all the second gears are configured to rotate in the same counterclockwise direction at the same second rotational speed, and wherein all the second gears are spaced apart from the first rack gear and the second rack gear. |