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发明名称
Dispositif de contrôle.
摘要
申请公布号
FR2702584(B1)
申请公布日期
1997.01.24
申请号
FR19940001873
申请日期
1994.02.18
申请人
FLUOROWARE INC
发明人
COLLINS TIMOTHY R.;CHINNOCK ROBERT T.;GRANT ROBERT C.;HAMILTON DEAN T.
分类号
G01M99/00;G01F1/24;G01F23/26;G01M3/16;G01M3/18;G01N17/00;G01N27/22;G01P5/08;G01P13/00;H01L21/302;H01L21/306;H01L21/3065;(IPC1-7):G07C3/00;G01D1/00;G01B7/14;G01D3/00;F16K37/00
主分类号
G01M99/00
代理机构
代理人
主权项
地址
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