| 摘要 |
PROBLEM TO BE SOLVED: To simplify assembling adjustment when a laser light source is exchanged and to improve excellently reproducibility in an optical axis and a beam shape of an outgoing beam. SOLUTION: An outgoing beam A from the laser light source 1 is led to a beam adjustment optical system 10 arranged on the prestage of an irradiation optical system 2 and capable of adjusting the beam shape and the optical axis. Thus, the shaping of the beam shape and the optical axis adjustment of the outgoing angle/outgoing position of the outgoing beam A are performed precisely without performing the assembling adjustment in the laser light source 1 and the irradiation optical system 2. |
