摘要 |
PROBLEM TO BE SOLVED: To provide a micromotor which has high speed, large drive power, and the minimum step size by constituting the motor with a thin and rectangular piezoelectric ceramic which has one electrode on one of the two large faces and a plurality of electrodes on the other large face. SOLUTION: A controller system 50 has a microcontroller 52 which controls the conduction of a pair of regulated power supplies 54, 56 and four switch modulator circuits 58, 60, 62, and 64. Each of the switch modulators is connected to either of the electrodes 14, 16 18, and 20, which are grounded to a second face through a tuning inductor 66. During operation, the microcontroller 52 notes the amount of motion required and generates AC or pulse voltage in each electrode so that a piezoelectric ceramic 10 may work in an appropriate excitation state. When the distance the piezoelectric ceramic should still move is reduced to an appropriate level or lower, the piezoelectric ceramic is switched to a high resolution and low speed mode. As a result, a micromotor which has high speed, large drive power, and the minimum step size can be obtained. |