| 摘要 |
PROBLEM TO BE SOLVED: To reduce the temperature for growing gallium nitride crystal and control the growing temperature. SOLUTION: Alkyl gallium hydride provided by replacing the methyl group with hydrogen is used for growing gallium nitride crystal instead of trimethyl gallium which has been used conventionally as gallium source. Thus, transiting energy is reduced in the crystal growing process and gallium nitride is grown at a low temperature. |
