发明名称 ALIGNMENT STAGE
摘要 PURPOSE:To cause a simple constitution to perform alignment at high accuracy, by making the upper board movable against the lower board through steel balls provided between the both and by arranging two sliding arbors perpendicularly to one side of the upper board, and one sliding arbor perpendicularly to the other side.
申请公布号 JPS5399875(A) 申请公布日期 1978.08.31
申请号 JP19770014240 申请日期 1977.02.14
申请人 HITACHI LTD 发明人 GOTOU TETSUYA;IKEDA MINORU
分类号 G12B5/00;H01L21/027;H01L21/68;H05K13/00 主分类号 G12B5/00
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