发明名称 AUTOGENOUS MILLING OF SILICON NITRIDE
摘要 Autogenous milling of silicon nitride The invention relates to a process for milling silicon nitride in which the silicon nitride is present in suspension in a liquid, wherein the milling is carried out autogenously and the silicon nitride is present in the suspension in a proportion of at least 30% by weight. The advantages of this process are essentially that the process procedure becomes simpler and cheaper and that the quality of the milled silicon nitride is improved.
申请公布号 CA2182839(A1) 申请公布日期 1997.02.09
申请号 CA19962182839 申请日期 1996.08.07
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 STEIDL, DIETER;VOLKER, WOLFGANG
分类号 B02C19/18;B02C17/16;B02C23/18;C01B21/068;F16K25/00;(IPC1-7):B02C17/16 主分类号 B02C19/18
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