发明名称 |
AUTOGENOUS MILLING OF SILICON NITRIDE |
摘要 |
Autogenous milling of silicon nitride The invention relates to a process for milling silicon nitride in which the silicon nitride is present in suspension in a liquid, wherein the milling is carried out autogenously and the silicon nitride is present in the suspension in a proportion of at least 30% by weight. The advantages of this process are essentially that the process procedure becomes simpler and cheaper and that the quality of the milled silicon nitride is improved. |
申请公布号 |
CA2182839(A1) |
申请公布日期 |
1997.02.09 |
申请号 |
CA19962182839 |
申请日期 |
1996.08.07 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
STEIDL, DIETER;VOLKER, WOLFGANG |
分类号 |
B02C19/18;B02C17/16;B02C23/18;C01B21/068;F16K25/00;(IPC1-7):B02C17/16 |
主分类号 |
B02C19/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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