| 摘要 |
<p>Highly wear-resistant titanium nitride coatings are produced by magnetron sputtering. The coating installation is evacuated to a residual gas pressure having a magnitude of less than about 1 x 10-4 Pa. Use is made of very pure gases, nitrogen and inert gas having a purity of at least 99.999 %. Contamination of the gases during the feed operation is excluded, for example, by the use of ultra-high vacuum technologies. The substrate to be coated is cleaned by wet chemistry and sputter-etching, and the titanium target is cleaned by sputter-etching. A bias voltage of 50 to 250 V, preferably 100 V, is applied to the substrate.</p> |
