| 摘要 |
A probe card clamping and changing mechanism comprising a probe card clamping mechanism and a probe card conveying mechanism. The probe card clamping mechanism comprises a pair of clamping blocks each having a groove for receiving a portion of the periphery of a probe card and two guide holes, a pair of guide members slidably received through the guide holes of the clamping blocks so as to slidably support support the clamping blocks axially slidably for parallel motion with the respective grooves of the clamping blocks facing each other, two pairs of links interconnecting the clamping blocks so that the clamping blocks are moved simultaneoulsy toward and away from each other, an actuator connected to one of the clamping blocks to move the same toward and away from the other, a pair of guide rails for guiding pins pivotally joining two pairs of the links, respectively, so that when the clamping block connected to the actuator is moved by the actuator, the other clamping block is moved accordingly. The probe card conveying mechanism includes a probe card conveying member provided with positioning pins fitting the positioning holes of the probe card and capable of being moved vertically and laterally to convey the probe card to a predetermined position in the probe card clamping mechanism and to remove the probe card from the probe card clamping mechanism.
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