VAPOR DEPOSITION DEVICE

摘要

PURPOSE:To uniformly heat a material to be vapor-deposited and to maintain a stable rate of evaporation by fixing a light introducing body in the wall of a vapor deposition chamber so that the material can be heated with IR radiated from the outside. CONSTITUTION:A holding vessel 3 is put in a vapor deposition chamber 1 and a material 2 to be vapor-deposited is held in the vessel 3. A heating element 4 is set at the outside of the chamber 1 and used as a heat source for evaporating the material 2. A light introducing body 7 is fixed in the wall of the chamber 1 so as to introduce direct light and/or reflected light from the element 4 into the vessel 3.