| 摘要 |
PURPOSE:To obtain a wafer marking device in which the roundness of a dot shape at the time of dot-marking on a wafer is improved by providing a light attenuator to be variably linked into an optical system in order to regulate output light, while the device is oscillated as a laser oscillator in the most stable area. CONSTITUTION:When a marking mode set by an input part 18 is normal, a marker controller 16 controls respective elements 2, 5, 7, 12 and 13 so as to mark dots at depths approximately 1.5 to 2.5mum on a wafer 15, and a single Q switching pulse marks a single dot. In this case, the regulation of the depth is determined manually or by a control signal from a marker controller 16 in an attenuator 12 beforehand. Further numbers of pulses A and B in a diesel mark mode and a soft mark mode are controlled by a computer, and they can be made freely variable by the software with the controller 16. |
