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发明名称
ION IMPLANTER
摘要
申请公布号
JPH02183958(A)
申请公布日期
1990.07.18
申请号
JP19890003218
申请日期
1989.01.10
申请人
SEIKO EPSON CORP
发明人
KOJIMA KUNIHIRO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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