| 摘要 |
PURPOSE:To conduct stable discharge by high repeated operation by providing a pair of reflectors, in which reflecting surfaces are formed oppositely while being positioned in the circulating flow path of a gas laser medium and interposing main discharge spaces and are formed in a roughened surface. CONSTITUTION:Shock waves having rough and dense distribution generated at the time of main discharge are reflected by a reflecting surface 21, and returned to the main discharge space 16 side. Since an irregular section is formed in a recessed surface shape on reflection, compression waves are made uneven with time, multiplexed and returned, thus breaking the rough and dense distribution of the shock waves in the main discharge space 16 on viewing from the direction of discharge. Discharge impedance in the lower main discharge space 16 is not varied extremely as compared to a time when there are compression waves, and is rather equalized, and the next main discharge pulses are generated under the state. Accordingly, the high repeated operation of laser oscillation can be realized stably. |
