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发明名称
COMPOUND SEMICONDUCTOR EPITAXIAL WAFER AND ITS MANUFACTURE
摘要
申请公布号
JPH04326724(A)
申请公布日期
1992.11.16
申请号
JP19910096815
申请日期
1991.04.26
申请人
SUMITOMO ELECTRIC IND LTD
发明人
KOUKADO KOUICHI;DOI HIDEYUKI;SHIRAKAWA FUTATSU
分类号
H01L21/205;H01L29/80
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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