TWO-TERMINAL NONLINEAR ELEMENT

摘要

PURPOSE:To provide the two-terminal nonlinear element with which excellent nonlinearity free from variations and thermal stability are compatibly obtd. CONSTITUTION:A MIM element consisting of a lower electrode 2, an anodically oxidized film 3 and an upper electrode 4 is formed on a substrate 6 and is connected to a pixel electrode 5. The lower electrode 4 is formed to a structure alternately having Ta part (poor parts) of a lower nitrogen content and Ta parts (rich parts) of a high nitrogen content. Behaviors are varied in the poor parts and the rich parts by such structure. The element has the good initial nonlinearity approximate to the initial nonlinearity of a beta-Ta thin film and the excellent thermal stability.