ALUMINUM NITRIDE SINTERED COMPACT AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce an aluminum nitride sintered compact excellent in thermal shock resistance and strength and applicable to purposes of use in severe heat cycles such as a heat radiating substrate for power modules or jigs for an apparatus for producing semiconductors. SOLUTION: This aluminum nitride sintered compact is a sintered compact containing a rare earth element-alkaline earth element compound system as a sintering aid and contains the alkaline earth element compound in an amount of 0.01-5 wt.% expressed in terms of oxides and the rare earth element compound in an amount of 0.01-10 wt.% expressed in terms of oxides. The content of carbon remaining in the sintered compact is controlled to 0.005-0.1 wt.% to thereby suppress the grain growth and improve the thermal shock resistance and strength of the sintered compact.