| 摘要 |
<p>A semiconductor wafer batchloading system comprises a portable carrier (32) for supporting and transporting wafers in a substantially particle free environment. A carrier door (42) is movable between an open position and a closed position overlying a carrier port (38) for sealing the interior of the carrier (32) from the surrounding environment. The carrier (32) is movable on a platform (60) between withdrawn and advanced positions for delivering multiple wafers to a wafer receiving station. The carrier door drive mechanism includes a generally planar door opener (102) movable between a lowered position and a raised position substantially coextensive with the carrier port. (38).</p> |
