| 摘要 |
PROBLEM TO BE SOLVED: To easily and rapidly inspect whether a black matrix and a transparent conductive film each having a specified pattern formed on the substrate of a color filter are relatively misaligned over a specified degree or not. SOLUTION: When a black matrix material film is patterned in a specified area of substrate 1, a plurality of aligning marks 3 for a transparent conductive film 5 are also formed from the black matrix material in the positions dispersed in the outside of the black matrix material film in the above specified area. When a transparent conductive film 5 of a specified pattern is formed by sputtering on the substrate 1, a plurality of accepting marks 7 are formed of the transparent conductive film material in the positions dispersed in the outside of the transparent conductive film 5 of a specified pattern. The relative misalignment between the aligning marks 3 and the accepting marks 7 is observed to judge whether the black matrix 2 and the transparent conductive film 5 each having a specified pattern are relatively misaligned over a specified degree or not. |
