摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition capable of forming a fine via hole with a high aspect ratio using a photolithography method so as to be able to obtain an adequate property in a high frequency band, easily employing a low temperature sintering method, and forming a substrate with high accuracy and superior strength. SOLUTION: The photosensitive ceramic composition includes an inorganic powder, inorganic micro-particles with average particle diameter of 0.003-0.08 μm and a photosensitive organic component. |