发明名称 PHOTOSENSITIVE CERAMIC COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition capable of forming a fine via hole with a high aspect ratio using a photolithography method so as to be able to obtain an adequate property in a high frequency band, easily employing a low temperature sintering method, and forming a substrate with high accuracy and superior strength. SOLUTION: The photosensitive ceramic composition includes an inorganic powder, inorganic micro-particles with average particle diameter of 0.003-0.08 μm and a photosensitive organic component.
申请公布号 JP2002162735(A) 申请公布日期 2002.06.07
申请号 JP20000362382 申请日期 2000.11.29
申请人 TORAY IND INC 发明人 YAMAHO TOMOYA;MASAKI YOSHIKI;OSHITA HIROSHI
分类号 G03F7/004;C08K3/00;C08L101/00;G03F7/40;H05K3/46 主分类号 G03F7/004
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