ELEMENT SUBSTRATE AND ITS MANUFACTURING METHOD, AND ELECTROOPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce wiring resistance in an element substrate having such nonlinear element as an MIM element, and the manufacturing method of the element substrate, and an electrooptical device using the element substrate. SOLUTION: A first conductor 11, a non-linear electric conductor 12, and a second conductor 13 are successively laminated on a substrate 1, nonlinear elements S1 and S2 having nonlinearity in current/voltage characteristics in the overlapped section are provided between wiring 2 for inputting signals and a pixel electrode 3. In this case, the first conductor 11 or the second conductor 13, and the wiring 2 for inputting signals and the pixel electrode 3 are formed by a high-conductivity metal layer having the same quality of material.