| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope stage which can simply correct the displacement of the casing and secure a proper moving range of the stage. SOLUTION: The position of the two casing 6 is corrected by making one end of the two casings 6 touch the rear stopper 81 of the upper stage 1 in the moving direction of the upper stage 1 and making the other end of the casing 6 touch the stopper 82 of the lower stage 3, further reversing the upper stage 1 from the first moving direction and keeping the other end of the two casing 6 in touch with the rear stopper 81 in the moving direction of the stage 1 and making the one end of the casing 6 touch the stopper 82 of the lower stage 3. COPYRIGHT: (C)2005,JPO&NCIPI
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