Conductive element for a movable electric circuit and a vibration gyroscope

摘要

A conductive element for a movable electrical circuit (a conductive element most suitable for an electric circuit that is placed on a movable element in which the shape of the circuit itself changes during circuit operation) which is Al-based and has an average cross sectional area for the crystal grain of 1 micron² or less. Preferably, this conductive element contains N+O at 550 to 20000 ppm in atomic concentration and also one or more selected from the group consisting of Si at 0.5-5.0% in atomic concentration, Ta at 0.5-5.0%, and Cu at 0.5-5.0%. More preferably, it contains Nd at 0.5-5.0%. This conductive element for a movable circuit is especially suitable for the wiring pattern in a vibrating gyroscope.