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发明名称
氧化锌奈米结构之制造方法
摘要
一种氧化锌(ZnO)奈米结构之制造方法。在此方法中,先提供一基板。接下来,可选择性地于基板表面上成长氧化锌缓冲层。接着,形成一氧化锌镁(MgZnO)成核稳定层(Nucleation Stabilization Layer)于此基板上之氧化锌缓冲层上。随后,成长一氧化锌奈米柱状结构层于氧化锌镁成核稳定层之一表面上。当仅形成氧化锌缓冲层与氧化锌镁成核稳定层之其中一者时,后续所形成之氧化锌奈米结构层系一氧化锌奈米墙状结构层。
申请公布号
TW200736156
申请公布日期
2007.10.01
申请号
TW095110802
申请日期
2006.03.28
申请人
国立成功大学
发明人
黄俊翰;刘全璞
分类号
B81C1/00(2006.01);C01G9/02(2006.01);C23C14/14(2006.01)
主分类号
B81C1/00(2006.01)
代理机构
代理人
蔡坤财
主权项
地址
台南市东区大学路1号
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