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发明名称
ELEKTROSTATISCHE VORRICHTUNG ZUR KORREKTUR DES CHROMATISCHEN FEHLERS IN EINEM TEILCHENOPTISCHEN GERÄT
摘要
申请公布号
DE69839072(D1)
申请公布日期
2008.03.20
申请号
DE19986039072
申请日期
1998.10.12
申请人
FEI CO.
发明人
HENSTRA, ALEXANDER;KRIJN, MARCELLINUS PETRUS
分类号
H01J37/153;H01J37/12
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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