Capacitive pressure sensor

摘要

In a capacitance type pressure sensor ( 1 ) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion ( 101 ) formed in a region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion ( 102 ) formed in a region of the diaphragm having small sensitivity with respect to a pressure, there is provided the capacitance type pressure sensor which is entirely small in size and superior in reliability by independently detecting a signal output value of the reference capacitance detecting portion ( 102 ).