ULTRASONIC RINSING DEVICE, AND ULTRASONIC RINSING METHOD

摘要

Provided are an ultrasonic rinsing device and an ultrasonic rinsing method, which match the high-frequency of ultrasonic waves while keeping a sound pressure in the inner bath of a rinsing bath, without thinning the plate thickness of the inner bath unlike the prior art, as might otherwise follow the high-frequency of ultrasonic waves. The ultrasonic rinsing device comprises a rinsing bath including an outer bath (5) for reserving a transmission medium to transmit ultrasonic vibrations, and an inner bath (3) arranged inside of the outer bath (5) for rinsing a rinsing object dipped in a rinsing liquid reserved in its inside, with the ultrasonic vibrations transmitted through the transmission medium. The bottom plate (3a) of the inner bath has a thickness of several integer times as large as one half wavelength (or a half wavelength) of the ultrasonic vibrations. The bottom plate (3a) of the inner bath is arranged at such an inclination that the bottom plate (3a) and the bottom plate (5a) of the outer bath may not be parallel to each other.