NANO-CRYSTALLINE COMPOSITE OXIDES THIN FILMS, ENVIROMENTAL GAS SENSORS USING THE FILM AND METHOD FOR PREPARING THE SENSORS

摘要

An environmental gas sensor employing a nano-crystal composite oxide thin film and a manufacture method thereof are provided to show high-sensitivity, high-selectivity, long-term stability and low power-consumption. A method for manufacturing an environmental gas sensor(100) employing a nano-crystal composite oxide thin film comprises the following steps of: forming a metal electrode(120) on a substrate(110); and growing different sort of oxide nano-crystal particles on the metal electrode to form a nano-crystal composite oxide thin film(140). The growth of the different sort of oxide nano-crystal particles is performed by a pulsed laser deposition method or a sputter method using a different kind of oxide ceramic target. The step of forming the nano-crystal composite oxide thin film is performed in the temperature range of room temperature to 800°C.