Optical system for illuminating substrate with light, particularly for use in microelectronics or in display technology, comprises light source for producing light, which is directed on substrate under angle of incidence

摘要

The optical system (10) comprises a light source (18) for producing light, which is directed on a substrate (12) under an angle of incidence (alpha). A deflection unit (22) is provided for turning back the light (30) on the substrate, where the light is reflected from the substrate. The deflection unit turns back the light on the substrate under another angle of incidence (beta) different to the former angle of incidence. An independent claim is included for a deflection unit for turning back the light on a substrate with an optical element.