MONOLITHIC ACCELERATION TRANSDUCER

摘要

A monolithic transducer including a fixed portion (1e1), two movable massive portions (2e1, 4e1) and a resonator (3e1) having ends secured to the movable portions, a flexible frame (5e1) surrounding the two movable portions, and two linking members (6e1, 7e1) connecting the frame (5e1) to the second movable portion (4e1) and the fixed portion (1e1). The frame forms a mechanical filter between the resonator and the fixed portion that is not exposed to resonator vibration. The overvoltage ratio of the resonator is not affected and the accuracy of the measurement provided by the transducer is increased. In a differential-output accelerometer, the position of the transducer (TAe1) is deduced from that of another identical transducer (TAe2) by 180 DEG rotation about an axis parallel to the resonator (3e2), with the fixed portions (1e1, 1e2) being rigidly interconnected.