Method of manufacturing semiconductor device

摘要

A method of manufacturing a semiconductor device including performing a first thermal processing a silicon substrate in a first atmosphere and at a first temperature to remove an oxide film above a surface of the silicon substrate, and after the first thermal processing, performing a second thermal processing the silicon substrate in a second atmosphere containing hydrogen and at a second temperature lower than the first temperature to terminate the surface of the silicon substrate with hydrogen.

主权项

1. A method of manufacturing a semiconductor device comprising:
performing a first thermal processing a silicon substrate in a first atmosphere and at a first temperature to remove an oxide film above a surface of the silicon substrate; and after the first thermal processing, performing a second thermal processing the silicon substrate in a second atmosphere including hydrogen and at a second temperature lower than the first temperature to terminate the surface of the silicon substrate with hydrogen, wherein: the first thermal processing comprises a first step and a second step after the first step, the first step is performed at a first pressure, in the first atmosphere and at the first temperature, the second step is performed at a second pressure, in the first atmosphere and at the first temperature, the second pressure is higher than the first pressure, a sublimation of the oxide film from the surface is enhanced at the first temperature and the first pressure, the first pressure is about vapor pressure of the oxide film at the first temperature, and a sublimation of silicon atoms from the surface is suppressed at the first temperature and the second pressure.