发明名称 |
Thin-layer circuits prodn |
摘要 |
Pattern etching of a very thin and therefore transparent metal layer coated onto a transparent support and partially covered by opaque layer consisting of different metal is effected by coating both metal layers with a photo-lacquer that dissolves when exposed to light and subsequently exposing this phot-lacquer layer from the support side so that the photo-lacquer only covers the regions of the upper metal layer. |
申请公布号 |
DE1947253(A1) |
申请公布日期 |
1971.03.25 |
申请号 |
DE19691947253 |
申请日期 |
1969.09.18 |
申请人 |
ROHDE & SCHWARZ |
发明人 |
DELFS,HANS,DIPL.-PHYS.DR.;KUECHLER,GERHARD |
分类号 |
C23F1/02;H01L49/02;H05K3/00;H05K3/06 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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