发明名称 Thin-layer circuits prodn
摘要 Pattern etching of a very thin and therefore transparent metal layer coated onto a transparent support and partially covered by opaque layer consisting of different metal is effected by coating both metal layers with a photo-lacquer that dissolves when exposed to light and subsequently exposing this phot-lacquer layer from the support side so that the photo-lacquer only covers the regions of the upper metal layer.
申请公布号 DE1947253(A1) 申请公布日期 1971.03.25
申请号 DE19691947253 申请日期 1969.09.18
申请人 ROHDE & SCHWARZ 发明人 DELFS,HANS,DIPL.-PHYS.DR.;KUECHLER,GERHARD
分类号 C23F1/02;H01L49/02;H05K3/00;H05K3/06 主分类号 C23F1/02
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