发明名称 PROCESS FOR CORRECTING WARPED SURFACE OF PLASTIC ENCAPSULATED SEMICONDUCTOR DEVICE
摘要 A process for correcting the warped surface of a plastic encapsulated semiconductor lead frame device. The semiconductor device is placed on a transporting plate and transported to a heating device. The semiconductor device and the transporting device are clamped between a pair of heating plates and heated. Then the semiconductor device and the transporting plate are removed from the device and clamped between a pair of cooling plates and cooled. The warp is corrected to a substantially flat surface.
申请公布号 KR970005713(B1) 申请公布日期 1997.04.19
申请号 KR19930014810 申请日期 1993.07.31
申请人 NEC KK. 发明人 NICHIKAWA, HIDEYUKI
分类号 H01L21/56;H01L23/31;(IPC1-7):H01L23/48 主分类号 H01L21/56
代理机构 代理人
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