| 摘要 |
PURPOSE:To obtain a high-precision oscillator which has a less frequency shift by providing a zinc oxide piezoelectric thin film at one end of the base part of a tuning-fork type quartz piece and by fixing a metallic thin film on said thin film. CONSTITUTION:On the main surface 2 and side surfaces 3 and 4 of a tuning- fork type quartz piece 1, energizing electrodes 9 are provided at two parts of each side of a lengthwise axis of symmetry with equal area, and at one end of its base part, a zinc oxide piezoelectric thin film 11 is formed. On the thin film 11, a metallic thin film 12 is so fixed that when the thin film 11 deforms finely, the amount of generated charge extracted in accordance with the shape and extent of the deformation is different. Consequently, the generation of deformation in oscillation is reduced, and the Q value is never decreased. Further, a secular change in frequency is not increased. |
