| 摘要 |
PURPOSE:To obtain an aluminum nitride granule excellent in flowability and formability by injecting a slurry contg. an aluminum nitride powder, sintering assistant, org. binder and org. solvent in a non oxidizing atmosphere to a specified grain diameter and drying the slurry. CONSTITUTION:To an aluminum nitride powder having 0.2-5mum average grain diameter, 2-8wt.%, based on the aluminum nitride, of a sintering assistant (e.g. oxides of rare-earth elements, especially yttrium oxide), 1-20wt.% of an org. binder (e.g. acrylic resin) and an org. solvent (e.g. ethanol) are added and mixed, and the viscosity of the slurry is controlled to <=2000cps. The volume ratio of the aluminum nitride powder to the sintering assistant is controlled to 5-50%. The slurry is sprayed into a nonoxidizing atmosphere to 0.02-0.5mm grain diameter and dried. In this case, the vapor pressure of the org. solvent is kept at 0.1-10kPa and the temp. difference between the atmosphere and slurry to 30-150 deg.C. The org. solvent content of the dried granule is controlled to 0.1-1wt.%. |
