发明名称 |
APPARATUS FOR DETERMINING THE PH OF LIQUIDS |
摘要 |
A method for determining the pH of liquids by a pH difference measurement of a solution under test and a reference solution and an apparatus for determining the pH of liquids is provided which can determine the pH with a precision equal to or better than 0.001 pH. The method and apparatus are especially useful for determining the pH and development speed of developers for positive photoresists.
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申请公布号 |
US5236568(A) |
申请公布日期 |
1993.08.17 |
申请号 |
US19910754672 |
申请日期 |
1991.09.04 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
STEINER, INGO |
分类号 |
G01N27/416;G01N27/403;G01N27/406 |
主分类号 |
G01N27/416 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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