SEMICONDUCTOR DEVICE

摘要

PURPOSE: To improve performance of operating speed and integration density in integrated circuit technologies. CONSTITUTION: The performance can be improved in semiconductor integrated- circuit techniques by providing superconductor interconnections 15 to 17 in a heterojunction device 1 which operates at a temperature lower than the transition temperature of the superconductor material. An array of GaAs/GaAlAs or Si/SiGe devices 4 are mutually wired by Y1Ba2Cu3O7-y superconductor at least at a chip level. Here y is about 0.1. The deviceal array also operates well at 77 deg. K.