| 摘要 |
PURPOSE:To produce a uniform, physically and chemically stable, electrically conductive thin film by forming an electron receptive plasma-polymerized film in low temp. gas plasma and doping the film with an electron donative substance. CONSTITUTION:An electron receptive org. compd. having nitrilo groups such as tetracyanoethylene is vaporized in low temp. gas plasma of a nonpolymerizable gas such as Ar generated in a vacuum chamber to form a plasma-polymerized film on a substrate. The formed film is doped with triethylamine or an electron donative substance contg. halogen or the like. Thus, a polymerized thin film having superior electrical conductivity can be formed without using other material or additives. |
