ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS

摘要

Electronic/electric components used in a clean room having a controlled atmosphere for treatment of substrates in the preparation of semiconductor devices, each comprising a resin substrate and an additive added to the resin substrate, the additive comprising an antistatic agent of a nonionic compound having a molecular weight of not less than 350, an antioxidant of a phenolic compound having a molecular weight of not less than 300, and at least one member selected from among lubricants, plasticizers, and water repellants, the additive being less likely to release a gaseous organic component from the resin substrate under service conditions.